Kalrez® 9600 FFKM Material Data Sheet

Kalrez® 9600 is a high-purity perfluoroelastomer (FFKM) compound developed for advanced semiconductor manufacturing processes where exceptional plasma resistance, ultra-low outgassing, and long-term sealing performance are critical. Designed for high-temperature vacuum environments exposed to fluorine- and oxygen-based plasma radicals, Kalrez® 9600 helps reduce contamination while extending seal life in next-generation semiconductor fabrication equipment.

Engineered for demanding deposition processes, Kalrez® 9600 provides outstanding resistance to plasma erosion, excellent compression set resistance, and exceptional thermal stability at temperatures up to 315°C (600°F). Its ultrapure cleaning and packaging, combined with extremely low particle generation, make it an ideal choice for applications where wafer yield and process purity are paramount.

Download the Kalrez® 9600 Technical Data Sheet

Review the technical data sheet below for detailed information regarding material properties, operating temperatures, plasma resistance, and recommended semiconductor applications. If you need assistance selecting the right Kalrez® compound, the sealing specialists at M&P Sealing can help identify the best material for your process.