Kalrez® 9100 FFKM Material Data Sheet

Kalrez® 9100 is a high-performance perfluoroelastomer (FFKM) compound developed for advanced semiconductor deposition processes requiring exceptional plasma resistance, ultra-low particle generation, and excellent thermal stability. Specifically designed for PECVD, HDPCVD, SACVD, Metal CVD, and Atomic Layer Deposition (ALD) applications, Kalrez® 9100 helps improve equipment reliability while reducing contamination in critical semiconductor manufacturing environments.

Its amber translucent formulation delivers outstanding resistance to oxygen- and fluorine-based plasmas while exhibiting very low erosion, low outgassing, and excellent elastic recovery. Kalrez® 9100 is ultrapure cleaned and packaged to support contamination-sensitive semiconductor fabrication, helping maximize wafer yield and extend seal life in demanding vacuum processing applications. A maximum continuous service temperature of 300°C (572°F) is recommended.

Download the Kalrez® 9100 Technical Data Sheet

Review the technical data sheet below for detailed information regarding material properties, operating temperatures, plasma resistance, and recommended semiconductor applications. If you need assistance selecting the right Kalrez® compound for your process, the sealing specialists at M&P Sealing are available to help identify the best solution for your application.