Kalrez® 8085 FFKM Material Data Sheet

Kalrez® 8085 is a high-performance perfluoroelastomer (FFKM) compound developed for semiconductor manufacturing applications requiring exceptional plasma resistance, low particle generation, and reliable sealing performance. Engineered for plasma etch, ash/strip, and deposition processes, Kalrez® 8085 helps reduce contamination while extending seal life in demanding semiconductor fabrication environments.

Formulated specifically for minimal particle generation in NF₃ plasma, Kalrez® 8085 exhibits very low weight loss in oxygen- and fluorine-based plasma environments while maintaining excellent mechanical strength. Its ultra-pure post-cleaning and packaging make it well suited for contamination-sensitive semiconductor processes where process consistency and equipment uptime are critical.

Download the Kalrez® 8085 Technical Data Sheet

Review the technical data sheet below for detailed information regarding material properties, operating temperatures, plasma resistance, and recommended semiconductor applications. If you need assistance selecting the right Kalrez® compound for your application, the sealing specialists at M&P Sealing are available to help identify the best solution for your process.