Kalrez® 8002 FFKM Material Data Sheet

Kalrez® 8002 is a high-purity perfluoroelastomer (FFKM) compound engineered specifically for semiconductor plasma processing applications where contamination control, plasma resistance, and reliable sealing performance are essential. Designed for use in advanced wafer fabrication equipment, Kalrez® 8002 helps minimize particle generation while providing exceptional resistance to aggressive plasma environments and semiconductor process chemistries.

Manufactured for critical semiconductor applications, Kalrez® 8002 combines outstanding chemical resistance with excellent mechanical properties to deliver long service life in demanding dry process equipment. Its low extractables and contamination-resistant formulation help improve wafer yield, reduce maintenance frequency, and support consistent manufacturing performance in high-purity processing environments.

Download the Kalrez® 8002 Technical Data Sheet

Review the technical data sheet below for detailed information regarding material properties, operating temperatures, chemical compatibility, and recommended semiconductor applications. If you need assistance selecting the right Kalrez® compound for your process, the sealing specialists at M&P Sealing are available to help identify the best solution for your application.