Kalrez® 6375UP FFKM Material Data Sheet

Kalrez® 6375UP is an ultra-high-purity perfluoroelastomer (FFKM) compound engineered for semiconductor wet process applications where low elemental extractables, exceptional chemical resistance, and reliable sealing performance are essential. Designed to meet the demanding requirements of modern semiconductor manufacturing, Kalrez® 6375UP helps reduce contamination while maintaining long-lasting sealing performance in aggressive chemical environments.

Built on the proven performance of Kalrez® Spectrum™ 6375, Kalrez® 6375UP delivers comparable mechanical properties and broad chemical compatibility while incorporating an ultra-pure manufacturing process to minimize contaminants. It is well suited for sealing applications exposed to acids, bases, amine-based strippers, and other wet process chemistries commonly used in wafer fabrication. Parts manufactured from Kalrez® 6375UP are supplied with ultrapure cleaning and packaging to support critical semiconductor processes.

Download the Kalrez® 6375UP Technical Data Sheet

Review the technical data sheet below for detailed information regarding material properties, operating temperatures, chemical compatibility, and recommended semiconductor applications. If you need assistance selecting the right Kalrez® compound for your process, the sealing specialists at M&P Sealing are available to help identify the best solution for your application.